RAINBOW压电陶瓷与形状记忆合金的集成  

Integration of Shape Memory Alloy and RAINBOW Piezoelectric Ceramics

作　　者：沈星[1] 刘永刚[1] 裘进浩[1] 

机构地区：[1]南京航空航天大学智能材料与结构航空科技重点实验室,江苏南京210016

出　　处：《金属热处理》2006年第8期15-17,共3页Heat Treatment of Metals

基　　金：江苏省自然科学基金(BK2006568);航空科学基金(04G52042);武器装备预研基金(51412010505HK0208)

摘　　要：采用物理气相沉积法在RAINBOW压电陶瓷上沉积了形状记忆合金膜,分析了不同制备工艺对膜层的影响,优化了工艺参数。划痕试验结果、XRD图谱以及电镜照片表明,膜层质量较好,而且与RAINBOW压电陶瓷还原层能形成良好的结合界面,为今后形状记忆合金(SMA)与RAINBOW压电陶瓷的进一步集成设计提供了可靠的依据。The shape memory alloy （SMA） was deposited on the RAINBOW piezoelectric ceramics by physical vapor deposition （PVD） method. The influence of fabrication process on the film was analyzed and the optimal fabrication parameters were studied. The results of nick tests, XRD and SEM examinations show that the deposited film has a high quality and a good interface with the reduced layer of RAINBOW ceramics, which offer a reliable experimental basis for the further study of integration of SMA and RAINBOW piezoelectric ceramics.

关 键 词：RAINBOW压电陶瓷 物理气相沉积 形状记忆合金 集成 

分 类 号：TG174.44[金属学及工艺—金属表面处理]