扫描近场声显微镜用于光盘表面薄膜结构的研究  

Application of SNAM in film deformation detection

作　　者：徐平[1] 蔡微[1] 余威[1] 钱建强[1] 姚骏恩[1] 

机构地区：[1]北京航空航天大学理学院,北京100083

出　　处：《电子显微学报》2006年第4期313-315,共3页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.10427401)~~

摘　　要：介绍了一种将超声检测技术与扫描探针显微技术相结合的扫描近场声显微镜(SNAM),并利用该装置对CD-R光盘表面薄膜进行了检测,得到了其平整印刷面的SNAM图像,与原子力显微镜(AFM)测得的凹槽数据面形貌吻合。文中介绍了这种SNAM的结构、基本工作原理和检测方法,并给出了具体的实验结果。Introduced a kind of home made scanning near field acoustic microscope （SNAM）combined ultrasonic detection technology and scanning probe microscopy. The piezoelectric transducer in the SNAM is used as ultrasonic signal generator, and the cantilever worked in contact mode. The SNAM image from the top surface of CD-R film agrees with the atomic force microscope （AFM） from the back surface. The working principle and detection method was also given in this paper.

关 键 词：超声检测技术 扫描探针显微技术 扫描近场声显微镜 CD—R光盘膜 

分 类 号：TH742[机械工程—光学工程] TG115.215.7[机械工程—仪器科学与技术]