金刚石薄膜在热敏打印头上的应用  

Diamond Films Applied to Thermal printing Heads

作　　者：王志勇[1] 姚江宏[1] 韩立[1] 陈光华[1] 

机构地区：[1]兰州大学物理系

出　　处：《兰州大学学报（自然科学版）》1996年第4期40-43,共4页Journal of Lanzhou University(Natural Sciences)

摘　　要：首次报道了用微波等离子体化学气相沉积（ＭＷＣＶＤ）技术在ＴａＮ２电阻材料上沉积高质量金刚石薄膜的制备工艺，以及扫描电镜、Ｘ射线衍射、拉曼光谱、压痕测试的测试结果。The results of SEM, XRD, Raman and indentation testing, as well as preparation conditions under which diamond films were deposited on TaN 2 electric resistance materials by employing microwave plasma chemical vapor deposition(MWCVD) techniques, were reported for the first time in this paper. Also, the probability of using CVD diamond as protective layers of TaN 2 thermal printing heads was indicated experimentally.

关 键 词：金刚石 薄膜 热敏打印机 打印机 热敏打印头 

分 类 号：TP334.8[自动化与计算机技术—计算机系统结构]