等离子体浸没离子注入对金属表面的改性  

The Application of Plasma Immersion Ion Implantation to Modify the Surface of Metal

作　　者：施芸城[1] 陈英方[1] 谢涵坤 吴知非[1] 蒋向荣 

机构地区：[1]中国纺织大学基础部

出　　处：《纺织高校基础科学学报》1996年第3期211-217,共7页Basic Sciences Journal of Textile Universities

基　　金：国家自然科学基金

摘　　要：报道用自制等离子体浸没离子注入设备进行三种不同处理以改善金属表面性质的研究：氮离子注入、钛的离子束增强沉积（ＩＢＥＤ）和氮及钛离子混合（ＩＢＭ）注入．俄歇浓度分布表明氮离子在金属表面层的注入是非常光滑的．Ｘ－光电子能谱指出ＩＢＥＤ和ＩＢＭ处理后样品表面有ＴｉＮ薄层形成．实验显示所有处理后金属的表面硬度和抗磨损性能都大为改善．This paper deals with the application to improving the surface properties of metals with the device developed by ourselves, using plasma immersion ion implantation (PI 3),ion beam enhanced deposition (IBED) of titanium and ion beam mixing (IBM) of nitrogen and titanium. Auger concentration profiles indicate that PI 3 of nitrogen produces a smooth implantation profile in the surface layer of the metal. The formation of a thin layer of TiN on the surface of the specimens trated by IBED and IBM was verified by X ray photoelectron spectroscopy. It has been demonstrated that the surface hardness and wear resistance of all the trated specimens were greatly improved.

关 键 词：等离子体 浸没 离子注入 金属 表面改性 

分 类 号：TG174.445[金属学及工艺—金属表面处理]