CVD金刚石膜X射线探测器的研制及性能研究  

Study on preparation and properties of X-ray detector based on CVD diamond film

作　　者：刘健敏[1] 夏义本[1] 王林军[1] 张明龙[1] 苏青峰[1] 史伟民[1] 

机构地区：[1]上海大学材料科学与工程学院电子信息材料系

出　　处：《核电子学与探测技术》2006年第5期669-672,共4页Nuclear Electronics & Detection Technology

基　　金：国家自然科学基金(60277024);上海市纳米专项(0452nm051);上海应用材料研究与发展资助;上海市重点学科(T0101)资助

摘　　要：金刚石以其独特的性能成为辐射探测器的理想材料。采用HFCVD方法制备了高质量、(100)取向的CVD金刚石膜,在此基础上研制出X射线探测器。使用55Fe 5.9keV X射线研究了CVD金刚石膜探测器的光电流和电荷收集效率。结果表明,探测器在偏压加到100V还具有好的欧姆接触;电场为50kV.cm-1时的暗电流与光电流分别为16.3和16.8nA;电荷收集效率η为45.1%,对应的电荷收集距离δ(CCD)为9.0μm。The inherent properties of diamond make it an ideal material for radiation detectors. In this work, （100）-textured CVD diamond film with better quality was obtained by using a hot filament chemical vapor deposition （HFC／rD） technique to fabricate as X-ray detectors. 5.9 keV X-rays were used to investigate the photocurrent and charge collection efficiency of the detector. For the CVD diamond detector, the electrical contact is a fine ohmic for bias voltage up to 100 V, and the darkcurrent of -16.3 nA and the photocurrent of -16.8 nA are obtained at an electrical field of 50 kV（cm^-1. The average charge collection efficiency of -45. 1% corresponding to the charge collection distance （CCD） value of 9.0 （m is achieved.

关 键 词：CVD金刚石膜 X射线探测器 光电流 电荷收集效率 

分 类 号：TL816.1[核科学技术—核技术及应用]