一种高效率低成本制作微透镜阵列的方法  

A Low-cost and Highly Efficient method for Fabricating Microlens Arrays

作　　者：范细秋[1] 张鸿海[2] 甘志银[2] 刘胜[2] 

机构地区：[1]浙江海洋学院机电工程学院,舟山316000 [2]华中科技大学机械科学与工程学院,武汉430074

出　　处：《机械科学与技术》2006年第9期1053-1055,1104,共4页Mechanical Science and Technology for Aerospace Engineering

基　　金：国家自然科学基金项目(50475137);高等学校博士学科点专项科研基金项目(20040487026)资助

摘　　要：通常采用的多次掩模光刻和离子束刻蚀制作微透镜阵列的方法不但制作效率低,而且易产生较大的制作误差。提出了一种在硅基底聚合物薄膜上热压制作微透镜阵列的工艺方法,并利用自制的热压印设备进行了热压制作衍射微透镜阵列的试验,讨论了影响压印精度的温度和压力等工艺参数,对压印的衍射微透镜阵列进行了轮廓测试和部分光学性能测试。测试结果表明,压印制作微透镜阵列的复形误差小于10%,衍射效率高于90%,为高效率低成本制作微透镜阵列提供了一种新的方法。Conventionally, microlens arrays are fabricated by multi-photolithography and etching steps, which is not only time-consuming but also prone to make large fabrication errors. This paper presents a novel method for fabricating microlens arrays by hot embossing on silicon substrates. Firstly, diffractive mierolens arrays are fabricated by using self-made hot embossing equipment. Secondly, the technical parameters such as temperature and pressure that affect embossing accuracy are discussed. Finally, their profiles and some optical performances are tested and measured. The test results indicate that their replication error is less than 10% and that their diffractive efficiency exceeds 90%. This demonstrates hot embossing is a low-cost and highly efficient method for fabricating microlens arrays.

关 键 词：热压印 微透镜阵列 衍射效率 

分 类 号：TN305[电子电信—物理电子学]