基于MMDM的微小型自适应光学系统实验研究  

Experiments and tests of micro adaptive optics system based on MMDM

作　　者：陈劲[1] 陈海清[2] 李俊[2] 余洪斌[2] 

机构地区：[1]华中科技大学物理系,湖北武汉430074 [2]华中科技大学光电子工程系,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2006年第9期60-62,共3页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：十五预研项目

摘　　要：建立了由微机械薄膜变形镜(MMDM)构成的微小型自适应光学系统,该系统具有低成本、低能耗、体积小的特点.在实验中验证了MMDM单个电极控制电压与其变形量的近似平方关系以及各电极产生形变的近似线性叠加关系.用叠代算法来控制MMDM,对系统进行了闭环实验与分析,结果表明此类系统可应用于星载光学系统.A microminiature adaptive optics system with a 37-channel micromachined membrane deformable mirror（MMDM） were built, which features low cost, low power consumption, small size. The quasi-quadratic relationship between voltage and displacement of an actuator, the quasi-linear superposing among the actuators for MMDM were experimentally verified in our experiments. An iterarive algorithm controlling the MMDM was used in the closed-loop system. The results were analyzed to show the feasibility of using MMDM for compensation of aberration in air-borne optical system.

关 键 词：微机械薄膜变形镜 像差校正 星载光学系统 

分 类 号：O43[机械工程—光学工程]