基于谐振原理的微机械疲劳试验装置的研究  

STUDY ON A MEMS FATIGUE TESTING DEVICE BASED ON THE RESONANCE PRINCIPLE

作　　者：丁雷[1] 尚德广[1] 张大成[2] 沈通[1] 贾冠华[1] 阎楚良[1] 

机构地区：[1]北京工业大学机电学院,北京100022 [2]北京大学微电子学系,北京100871

出　　处：《机械强度》2006年第5期684-689,共6页Journal of Mechanical Strength

基　　金：国家自然科学基金资助项目(50575004);北京市拔尖创新人才资助项目~~

摘　　要：设计出一种基于梳状驱动器原理的静电力驱动的微机械疲劳试验装置,该装置可由典型的表面牺牲层标准工艺制作。对所设计的MEMS(micro-electro-mechanical system)疲劳试验装置中的圆弧梳状驱动器的电容及静电驱动力进行理论分析,并采用ANSYS机电耦合单元对装置的振动过程进行模拟,模拟结果与理论分析相吻合。研究结果表明在一定范围交流电压的驱动下试样能达到MEMS疲劳测试所要求的应力水平,并对该电压范围进行预测。A novel MEMS（micro-electro-mechanical system） fatigue testing device based on the electrostatic force by comb driver is proposed, which can be fabricated by means of the typical surface micromachining technology. The capacitance and the electrostatic force are analyzed theoretically for the proposed arc-shaped comb driver. The vibrating process of device is simulated utilizing the electromechanical coupled-field element by ANSYS. The simulation results show a good correction with the theoretical prediction. The results indicated that the stress of sample can achieve the required level for MEMS fatigue testing under AC voltage. In addition, the range of the used AC voltage is also evaluated.

关 键 词：微机电系统 疲劳 梳状驱动器 有限元方法 机电耦合分析 

分 类 号：TH873.31[机械工程—仪器科学与技术] TB302.3[机械工程—精密仪器及机械]