LaAlO_3衬底上磁控溅射的大面积YBa_2Cu_3O_（7－x）薄膜微观组织  

Study on Microstructure of Large Area YBa_2Cu_3O_(7-x) Thin Film Magnetron-Sputtered on LaAlO_3 Substrate

作　　者：王瑞坤[1] 王小平[1] 杨秉川[1] 刘安生[1] 袁冠森[1] 

机构地区：[1]北京有色金属研究总院

出　　处：《中国稀土学报》1996年第3期276-279,共4页Journal of the Chinese Society of Rare Earths

基　　金：国家超导研究和开发中心资助

摘　　要：用分析电镜和高分辨电镜对在３０ｍｍ×３０ｍｍＬａＡｌＯ３衬底上，采用中空柱状阴极直流磁控溅射的高ＪｃＹＢａ２Ｃｕ３Ｏ７－ｘ（ＹＢＣＯ）薄膜的微观组织结构进行了研究。薄膜为ｃ轴取向ＹＢＣＯ，含有少量Ｙ２ＢａＣｕＯ５颗粒和纺锤状Ｙ２Ｏ３。膜内主要晶体缺陷为［００１］刃位错和螺位错、堆垛层错、（００１）晶面弯曲带、小于１５ｎｍ的晶格畸变区和阳离子空位。ＬａＡｌＯ３衬底表面呈阶梯状并有小坑。衬底表面第一层膜原子为ＣｕＯ和ＣｕＯ２层，以致在界面形成ＢａＣｕＯ２和ＹａＢａＣｕ２Ｏ５相。ＬａＡｌＯ３衬底表层有较多位错，对薄膜外延生长和缺陷的形成有明显影响。Microstructure of high Jc YBa2Cu3O7-x(YBCO)thin film-deposited on LaAlO3 substrate of 30 mm×30 mm by DC-magnetron sputtering using hollow cylinder cathode was studied with an analytical electron microscope and high resolution electron microscope.The c-axis oriented YBCO thin film included small amount of Y2BaCuO5 particles and spindle-shaped Y2O3[001] type edge and screw dislocations,stacking faults,bend zone of(001) crystal planes,lattice distored areas sized less than 15 nm and cation vacancies were found In the thin film. There were steps and small pits on the surface of LaAlO3 substrate.The first layer film on the substrate surface consists of CuO and CuO2 layer so that BaCuO2 and YBaCu2O5 phases were formed at the interface between the film and substrate.There exist considerable dislocations in surface layer of the substrate.The defects on the surface and in surface layer of the substrate obviously affected on the epitaxial growth of the film and on the formation of the defects in the film.

关 键 词：薄膜 微观组织结构 磁控溅射 YBCO 超导体 

分 类 号：TM262[一般工业技术—材料科学与工程]