溶胶-凝胶法制备YBa_2Cu_3O_(7-x)超导薄膜的研究  

Preparation of YBa_2Cu_3O_(7-x) superconducting films by sol-gel method

作　　者：陈源清[1] 赵高扬[1] 薛人中[1] 严复学[2] 李颖[2] 

机构地区：[1]西安理工大学材料科学与工程学院,陕西西安710048 [2]西安理工大学材料现代分析测试中心,陕西西安710048

出　　处：《功能材料》2006年第9期1423-1425,1428,共4页Journal of Functional Materials

基　　金：国家重大基础研究前期研究专项资助项目(2003CCA03300);国家自然科学基金资助项目(904401009)

摘　　要：传统的TFA-MOD法制备YBa2Cu3O7-x薄膜,采用Y、Ba、Cu 3种金属的三氟醋酸盐(TFA)为先驱体,在热分解时,会产生大量的HF气体,即使通过将近20h的缓慢升温过程来对薄膜进行热分解,也难以获得较为光洁的表面,从而无法实现厚膜的制备。本文提出了一种新的含氟溶胶-凝胶工艺,通过减少溶胶中F的含量,并利用二乙醇胺做修饰剂,缩短了热分解时间,提高了薄膜的表面光洁度。利用该方法在(010)LaAlO3衬底上制备了具有良好c轴取向,临界转变温度为89K的YBCO超导薄膜。The traditional TFA-MOD method for fabrication of YBa2Cu3O7-x （YBCO） films or coated conductors is based on the precursor solution using trifluoroacetates （TFA） of yttrium, barium and copper （all-TFA solution）. However, due to large amounts of HF generation during the pyrolysis process, the long pyrolysis time of approximately 20h is needed to obtain YBCO films with smooth surface. In order to shorten the pyrolysis time and obtain films with good surface quality, a new precursor solution tailored by diethanolamine with less amount of fluorine was prepared. Results show that the as-prepared YBCO film is expitaxially grown on （010） LAO substrate, and has a critical transport temperature of 89K.

关 键 词：YBA2CU3O7-X TFA 薄膜 

分 类 号：TM262[一般工业技术—材料科学与工程]