Structural and Optical Properties of ZnO Films with Different Thicknesses Grown on Sapphire by MOCVD  

作　　者：HOU Chang-min HUANG Ke-ke GAO Zhong-min LI Xiang-shan FENG Shou-hua ZHANG Yuan-tao DU Guo-tong 

机构地区：[1]State Key Laboratory of Inorganic Synthesis and Preparative Chemistry, College of Chemistry, Jilin University, Changchun 130012, P. R. China [2]College of Electronic Science and Engineering, Jilin University, Changchun 130012, P. R. China

出　　处：《Chemical Research in Chinese Universities》2006年第5期552-555,共4页高等学校化学研究（英文版）

基　　金：Supported by the National Natural Science Foundation of China(Nos. 20071013 and 20301007).

摘　　要：ZnO（002） films with different thicknesses, grown on Al2O3 （006） substrates by metal-organic chemical vapor deposition（ MOCVD）, were etched by Ar ion beams. The samples were examined by D8 X-ray diffraction, scanning electron microscopy（SEM）, and photoluminescence（PL） spectrometry. The structural properties vary with the increasing thickness of the films. When the film thickness is thin, the phi（Φ） scanning curves for ZnO（103） and sapphire（116） substrate show the existence of two kinds of orientation relationships between ZnO films and sapphire, which are ZnO（002）//Al2O3 （006）, ZnO（ 100）//Al2O3 （110） and ZnO（002）//Al2O3 （006）, ZnO（ 110）//Al2O3 （110）. When the thickness increases to 500 nm there is only one orientation relationship, which is ZnO（002）// Al2O3 （006）, ZnO [ 100]//Al2O3 [ 110]. Their photoluminescence（PL） spectra at room temperature show that the optical properties of ZnO films have been greatly improved when increasing the thickness of films is increased.ZnO（002） films with different thicknesses, grown on Al2O3 （006） substrates by metal-organic chemical vapor deposition（ MOCVD）, were etched by Ar ion beams. The samples were examined by D8 X-ray diffraction, scanning electron microscopy（SEM）, and photoluminescence（PL） spectrometry. The structural properties vary with the increasing thickness of the films. When the film thickness is thin, the phi（Φ） scanning curves for ZnO（103） and sapphire（116） substrate show the existence of two kinds of orientation relationships between ZnO films and sapphire, which are ZnO（002）//Al2O3 （006）, ZnO（ 100）//Al2O3 （110） and ZnO（002）//Al2O3 （006）, ZnO（ 110）//Al2O3 （110）. When the thickness increases to 500 nm there is only one orientation relationship, which is ZnO（002）// Al2O3 （006）, ZnO [ 100]//Al2O3 [ 110]. Their photoluminescence（PL） spectra at room temperature show that the optical properties of ZnO films have been greatly improved when increasing the thickness of films is increased.

关 键 词：MOCVD ZnO film PL spectrum Thickness 

分 类 号：O614.241[理学—无机化学]