微型半球陀螺非轴对称结构的电刚度补偿方法研究  

Study on electricity rigidity compensation of miniature hemisphere gyroscope's resonator

作　　者：嵇海平[1] 吴洪涛[1] 倪受东[1] 

机构地区：[1]南京航空航天大学机电学院

出　　处：《传感器与微系统》2006年第9期46-48,共3页Transducer and Microsystem Technologies

基　　金：江苏省自然科学基金资助项目(BK2003091)

摘　　要：微型半球谐振陀螺仪可以感测角速度和转角。但由于实际结构的非轴对称性,导致感测上产生误差。提出了一种电刚度补偿方法,即调节67.5,°90,°112.5,°135°不同位置的4个平衡电极的电压来调节谐振体刚度,从而达到结构轴对称;并通过有限元分析方法和灵敏度法求得4个平衡电极的电压值。The miniature hemisphere resonance gyroscope is used to measure not only the rotation rate but also the rotation angle. But as a result of the actual structure＇ s asymmetry ,it causes the feeling error. The electricity rigidity compensation is proposed;the balance electrodes＇ voltages at the position of 67.5°,90°, 112.5 °, 135° are regulated to adjust the resonant body rigidity, therefore achieving the structure axial symmetry. And the voltage values of four balanced electrodes are obtained by the finite element analysis method and the sensitivity method.

关 键 词：微型半球陀螺仪 电刚度补偿 灵敏度 有限元 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]