一种新结构薄型压电行波小马达  

A NEW TYPE OF PIEZOELECTRIC TRAVELING WAVE MICROMOTORS

作　　者：沈德新[1] 张健[1] 张保安 卢建国 杨根庆[1] 王渭源[1] 

机构地区：[1]中国科学院上海冶金研究所传感技术国家重点实验室

出　　处：《功能材料与器件学报》1996年第3期137-142,共6页Journal of Functional Materials and Devices

基　　金：国家攀登计划B"微电子机械系统"项目

摘　　要：本文设计和研制了一种新结构薄型压电行波小马达。小马达由圆形压电薄片或圆环形压电薄片和兼作公共电极的金属弹性体联成一体作马达的定子，薄型转子坐落在公共电极金属弹性体上，从而使压电马达的构造简单，也简化了制作工艺。研制成的薄型压电行波小马达直径φ８ｍｍ，定子总厚度≤３５０μｍ，在１０－１２伏交变电讯号激励下，转子转速≥１００ｒｐｍ。Anew type of piezoelectric traveling wave micromotors has been designed and fabricated. The small motor is composed by the stator which is the combination of annular/circular membrane and metal elastic base using as the common electrode at the same time and the rotor which is placed on the metal elastic body.Thus,the motor structure is simple and easy to fabricate.A piezoelectric traveling wave micromotor has been fabricated with the stator diameter 8mm.The total thickness of the stator is 350μm.Under the alternative excitation voltage 10-12V,the revolving speed of the rotor is more than 1 00rpm.

关 键 词：压电马达 行波 薄型 弹性体 振动 微电机 

分 类 号：TM38[电气工程—电机]