台阶阵列阴极真空微电子压力传感器研究  

NOVEL VACUUM MICROELECTRONIC PRESSUHE SENSOR WITH A STEPPED CATHODE

作　　者：夏善红[1] 崔大付[1] 韩泾鸿[1] 陈绍凤[1] 王利[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《功能材料与器件学报》1996年第3期182-186,共5页Journal of Functional Materials and Devices

摘　　要：本文提出并研究了一种新型台阶阵列阴极真空微电子压力传感器。与平面阵列阴极真空微电子压力传感器相比，该传感器在扩展量程和提高灵敏度方面有较大的潜力。作者展示了计算机模拟计算结果和部分实验结果。This paper briefly analyzes the characteristics of various types of pressure sensor and proposes anew type of pressure sensor,i.e.a vacuum microelectronic pressure sensor with the emission tips distributed on a stepped cathode instead of a conventional flat cathode. The authors have calculated and compared the emission current of the novel stepped cathode and the conventional flat cathode.The calculation results indicate that the new sensor has the advantages of higher sensitivities and larger measurement range than the conventional vacuum microelectronic pressure sensor with the emission tips distributed on a flat cathode, The fabrication of the stepped cathode emission array have also been described.

关 键 词：真空微电子 压力传感器 台阶阵列阴极 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]