MEMS器件缩减模型建模方法研究  

Study on the Modeling Method of Reduced-Order Model for MEMS Devices

作　　者：卢凉[1] 杜平安[1] 秦东兴[1] 阎威[2] 

机构地区：[1]电子科技大学机械电子工程学院,成都610054 [2]中国工程物理研究院911信箱71分箱,四川绵阳621900

出　　处：《电子科技大学学报》2006年第5期841-843,共3页Journal of University of Electronic Science and Technology of China

摘　　要：论述了微机电系统(MEMS)器件缩减模型的建立是进行MEMS系统级模拟的关键。论证了基于线性正交振型建立MEMS器件缩减模型是一种有效的方法,导出了MEMS器件动态缩减模型的微分方程,即根据能量守恒定律,用广义坐标表示系统的各个能量域,用线性正交振型的叠加对微分方程进行解耦,建立起一组表征器件动态特性的常微分方程,就可以利用现有的系统级仿真软件和电路一起进行系统级模拟。Reduced-order models of MEMS devices are the key step of system-level simulation for MEMS. It is an effective way that reduced-order models of MEMS devices are established based on linear orthogonal mode shapes. The differential equations of dynamic reduced-order models are deduced. According to the law of energy conservation, every energy domain of the system can be represented by generalizing coordinates, and the coupled differential equations can be solved by superposition of linear orthogonal mode shapes. Consequently, a set of differential equations representing dynamic characteristics of MEMS devices can be expressed. As a result, the system-level simulation can be performed by existing software of circuit simulation.

关 键 词：微机电系统 振型 缩减模型 器件 

分 类 号：TN401[电子电信—微电子学与固体电子学] TH113.1[机械工程—机械设计及理论]