智能化接触式干涉仪  

Intelligent Contact Interferometer

作　　者：陈吉武[1] 汪伟[1] 李雁飞 亓勇[1] 

机构地区：[1]中国计量学院,浙江大学

出　　处：《现代计量测试》1996年第5期20-23,共4页Modern Measurement and Test

摘　　要：本文叙述了智能化接触式干涉仪的基本原理和方法，即用ＣＣＤ作为光电转换接收器，代替人眼工作；用单片机自动处理信号，代替手工处理．并分析了这样改进后的仪器精度上不仅未受损失，反而略有提高．In this paper, we present the basic principle and method of theintelligent contact interferometer.The CCD is used as the photoelecttic receiver, replacing the eyes; the microprocessor is used to process the slghalsautomatically, replacing manual management. Besides, wei demonstrate, thatthe accuracy of the improved instrument is not decreased, on the contrary, is increased a little.

关 键 词：干涉仪 智能仪器 接触式干涉仪 

分 类 号：TH744.3[机械工程—光学工程]