平面线圈型MEMS微电磁驱动器的理论分析与实验研究  

Theoretical Analysis and Experimental Study of a Planar Type MEMS Electromagnetic Actuator

作　　者：杨昊宇[1] 赵小林[1] 戴旭涵[1] 邵国成[1] 丁桂甫[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家重点实验室

出　　处：《传感技术学报》2006年第05B期1920-1923,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(50405013);上海市科委重点实验室基金项目资助(05dz22309)

摘　　要：介绍了一种平面线圈型电磁驱动的MEMS微驱动器,基于分段磁路的网络方程法,针对微电磁驱动器所采用的平面线圈的结构特点,比较了考虑磁动势的分布效应和传统的集总处理两种方法所建立的平面线圈微驱动器的非线性磁路模型.实验结果表明考虑线圈绕组半径不同而产生的分布效应可以为平面线圈型微驱动器建立可靠的模型,便于定量分析微驱动器结构物理参数对于磁通分布和电磁力的影响,从而为进一步优化设计该微电磁驱动器提供了理论分析依据.A planar type MEMS electromagnetic actuator is described. Based on the network sloving method of magnetic circuits, considering the structural characteristic of planar coil, a comparison is made between two ways for nonlinear modeling of the device： distributed mechod and lumped method. The experimental results indicate that it is much more reliable to build a model considering the distributing effects caused by different radius of every coil turn. And this model helps to quantify the structure relying flux and magnetic force. Thus a theoretical method of further optimizing the device is provided.

关 键 词：微机电系统(MEMS) 继电器 电磁驱动 非线性磁路 

分 类 号：TN602[电子电信—电路与系统]