电极形状对FBAR横模特性的影响  

Effect of FBAR Electrode Shape on Transverse Coupling wave

作　　者：吴碧艳[1] 

机构地区：[1]浙江工商大学计算机科学与信息工程学院,杭州310015

出　　处：《传感技术学报》2006年第05B期1924-1926,1929,共4页Chinese Journal of Sensors and Actuators

摘　　要：从四类压电方程入手推导了六角晶系压电薄膜的FBAR横模的阻抗特性,分析了产生横模的原因,并基于此用ANYSYS进行了有限元仿真,分析了方形、三角形、圆形和五边形等电极形状对FBAR横模的影响,仿真结果与实际测量值接近,说明了分析方法的准确性.Derived from forth piezoelectric function theories, the transverse coupling wave equation of sound wave and electromagnetic wave and impedance is analyzed. The effect of the electrode shape on transverse coupling wave is simulated based above function by ANYSYS. The electrode shape includes square, triangle, round and pentagon. The simulation results are closed to the measurement.

关 键 词：FBAR 压电方程 ANYSYS 边界条件 

分 类 号：TN713[电子电信—电路与系统]