基于NEMS技术的介电泳芯片及其关键工艺问题的研究  

A new 3-D Nanogap Electrode Grid Array Biosensor Based on NEMS and Critical Problems on Fabrication

作　　者：刘泳宏[1] 赵湛[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室

出　　处：《传感技术学报》2006年第05B期1978-1982,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(60572014)

摘　　要：结合信息技术、生物技术与纳米技术的发展,提出一种基于NEMS技术的“三维纳隙网格阵列微电极生物传感器”设计,用于生物样品在蛋白或细胞水平上的介电泳分离和检测.重点针对传感器制作的关键工艺问题,创新性地提出了一种利用反应离子刻蚀侧向钻蚀效应实现纳隙薄金属悬臂梁结构的理论和方法,此方法对电容式生物传感器的制作有普遍的实践意义.The design of a new 3-D nanogap electrode grid array biosensor based on dielectrophoresis, impedance method and NEMS tech is reported. It is expected to separate and identify ceils and protein molecule by dielectrophoresis and impedance method. Researches are done about the most important problem on the fabrication of the biosensor. A new technique that makes use of the sidewall etching of RIE to form nanogap thin metal cantilever is put forward. The anisotropy of RIE is modeled and simulated. This method is proved to be applicable by analysis. Some experiments supporting the conclusion are also shown. This technique is proved to be applicable for the manufacturing of precision impedance sensor with 3-D nano structure.

关 键 词：生物传感器 介电泳 反应离子刻蚀 NEMS技术 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]