新型高灵敏度低功耗的磁场传感器设计与模拟  

Modeling of a Novel Magnetometer with High Sensitivity and Low Power Consumption

作　　者：刘玉菲[1] 赵本刚[1] 吴亚明[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点联合实验室

出　　处：《传感技术学报》2006年第05B期2068-2071,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助;"高灵敏度的MOEMS磁场传感器研究"(60572022)

摘　　要：提出了一种用于微弱磁场检测的新型MOEMS磁场传感器结构,包括MEMS微扭转敏感结构、磁性敏感薄膜和光学检测部分.文中分析了器件的磁敏感原理和光学检出原理,给出了器件的结构参数、模态分析和综合设计考虑,并利用Mat-lab进行了解析计算,通过ANSYS进行了模拟仿真分析.分析结果表明:通过双光纤准直器和光电探测器监测微扭转镜面的扭转,该器件可以实现60nT的磁场探测,其探测灵敏度可以达到0.6dB/μT.A novel MOEMS magnetometer was introduced, including MEMS torsional sensitive structure, magnetic film and optical detection. The theory about sensing and optical detect of the device was discussed 1. The design of structure, analysis with ANSYS and Matlab, optimization of the device were showed. The performance of the device was simulated and analyzed. It shows that optical insertion loss signal can be received by dual fiber collimator and PIN, the magnetic induction 60nT could be detected and the sensitivity would be better than 0. 6dB/T.

关 键 词：MOEMS技术 磁场传感器 扭转微镜面 双光纤准直器 

分 类 号：TM936[电气工程—电力电子与电力传动] TM27[一般工业技术—材料科学与工程]