复合量程微加速度计的研究  

Research on Multi-Ranged Micro Accelerometer

作　　者：熊继军[1] 毛海央[1] 张文栋[1] 徐栋[1] 郭涛[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051

出　　处：《传感技术学报》2006年第05B期2200-2203,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(50535030;50405025;50375050);霍英东基金资助(01052)

摘　　要：在同一个物理过程中往往存在相差上数十倍甚至上万倍的多个加速度值需要测量,例如,分析弹体在发射和飞行过程中的受力情况,既需要测试发射过程中上万个g的加速度,也需要测试飞行过程中几个g的加速度.在这些场合用同一个加速度计很难满足整个过程的测试要求.针对类似的需求,介绍了一种由四个压阻式微加速度计组成的复合量程微加速度计,四个微加速度计量程分别为100g、500g、1000g和2000g.除了主要介绍微加速度计阵列的设计、制造和测试外,还着重介绍了低量程传感器在高过载环境下的结构防护问题.线性测试结果表明该复合量程微加速度计具有较好的线性度,因而可以同时在测量四个不同的量程的加速度值.In the process of a physical procedure, there might be more than one accelerations to be measured, for instance, to analyze the forces applied to an object in both its launching and flying procedures, not only the large accelerations （larger than 10,000g） during its launching, but also the small accelerations （smaller than 10g） during its flying procedure should be measured. Therefore, in such a situation, a single micro accelerometer can hardly satisfy the testing requirement. To solve this kind of problems, a multi-ranged micro accelerometer is designed and fabricated. This multi-ranged accelerometer contains four piezoresistive accelerometers, the testing ranges of which are 100g, 500g, 1000g and 2000g, respectively. The design, fabrication and the preliminary testing of this sensor is introduced, besides the structural protection for these low-range sensors in the situation of over-loading is mainly described. Finally, the testing demonstrates that such a multi-ranged sensor has a good linearity, thus it can be used to measure four accelerations within four individual ranges.

关 键 词：复合量程微加速度计 压阻式 抗过载 体硅工艺 线性度 

分 类 号：TN302[电子电信—物理电子学]