三轴微机械陀螺仪的结构设计与仿真  

Design and Simulation of A Three-Axis Micromachined Gyroscope

作　　者：唐群[1] 王寿荣[1] 

机构地区：[1]东南大学仪器科学与工程系,南京210096

出　　处：《传感技术学报》2006年第05B期2212-2214,2219,共4页Chinese Journal of Sensors and Actuators

摘　　要：提出了一种适应国内加工条件的三轴微陀螺仪,依据三轴陀螺的结构和工作原理,利用ANSYS有限元仿真软件对三轴陀螺的设计进行了计算和仿真.在此基础上,通过调节结构参数实现各轴驱动模态与敏感模态固有频率的匹配以提高各轴的灵敏度.最后介绍了加工所采用的工艺.A three-axis micromachined gyroscope suitable to our current fabrication condition was proposed. On the basis of the structure and the principle of operation, the three-axis micromachined gyroscope was calculated and simulated by using the finite element software ANSYS. In order to improve the sensitivity of each gyroscope, a method for adjusting the structure parameter that the natural frequencies in drive mode and sense mode was matching is proposed. Finally the fabrication being used was introduced.

关 键 词：三轴 微机械陀螺 ANSYS仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] V241.5[自动化与计算机技术—控制科学与工程]