圆形振动膜硅微电容传声器  

Silicon Condenser Microphone with Round Membranes

作　　者：田静[1] 汪承灏[1] 徐联[1] 乔东海[1] 马军[1] 郝震宏[1] 魏建辉[1] 

机构地区：[1]中国科学院声学研究所,北京100080

出　　处：《传感技术学报》2006年第05B期2297-2299,2303,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金SOC重大科研计划重点项目资助(90207003;90607003);国家863项目资助

摘　　要：硅微传声器是一种用MEMS技术制造的、将声信号转换为电信号的声学传感器.该传声器只需五次光刻工艺即可制作完成,其灵敏度在偏置电压为9V时可达15mV/Pa左右,在100Hz^18kHz的范围内的频率响应也较平坦.Silicon micro-microphone using MEMS technology is a type of micro acoustical sensor to transform sound signal into electric signal. A new type of silicon condenser microphone with round membranes is introduced. The microphone is designed and realized with an only 5 masking process and. with a sensitivity of about 15mV/Pa under a bias voltage of 9V. A flat response is obtained in the frequency range of 100Hz～18kHz.

关 键 词：声学微电子机械系统 硅微电容传声器 圆型振动膜 

分 类 号：TN641.2[电子电信—电路与系统]