梳齿谐振器宏模型的系统级应用  

The System Lever Application of Comb Resonator Macromodel

作　　者：李俊[1] 李晓莹[1] 吕湘连[1] 闫子建[1] 常洪龙[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《传感技术学报》2006年第05A期1340-1343,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助(50375125);博士点基金资助项目(2003069903;20040699009)

摘　　要：宏模型的获取是由Krylov子空间投影法结合器件级有限元分析的宏建模方法来实现,利用此模型和基于可重用IP设计思想的系统级组件建模方法建立由VHDL-AMS语言描述的梳齿谐振器系统级模型,在华大VDE仿真平台上搭建出了梳齿谐振器的系统模型,并进行一系列的仿真,包括时域阶跃、交流电压信号仿真和频域交流小信号仿真,仿真结果与商用仿真工具ANSYS仿真结果保持良好的一致.The system level simulation of macromodel makes great use of the advantage of system level and physical level of MEMS design, makes it convenient to exchange design information between two level, shorten the MEMS design period. The Comb resonator, which is in common use in MEMS area, has been chosen as an example to illuminate the use of macromodel in system level , and the base on reuse intellectual property （IP） method,VHDL-AMS language and Zeni VDE simulation bench are used to implement this method. With the time domain and frequency domain simulation, the precision of macromodel and the short time consumption of simulation are validated compare with the design desire and simulation result of ANSYS, a general FEA simulator.

关 键 词：宏模型 VHDL-AMS MEMS 系统级 可重用IP 

分 类 号：TN751.2[电子电信—电路与系统] TN302