平面内运动热执行器的节点模型  

A Nodal Analysis Model for In-Plane Electrothermal Microactuators

作　　者：黎仁刚[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2006年第05A期1358-1363,1367,共7页Chinese Journal of Sensors and Actuators

摘　　要：本文提出了一种平面运动热执行器的热-电-机械耦合节点模型,此模型不仅可以仿真热执行器中随温度变化的热导率、电阻率和热膨胀率效应,而且可以仿真热执行器机械域的几何非线性效应,从而使用于仿真热执行器的行为的节点法模型实用化.ANSYS有限元仿真的结果证明此模型的不但精度较高,而且计算效率很高.A nodal analysis model of the in-plane coupled electro-thermo-mechanical microactuators is introduced. This paper simulates the temperature dependent thermal conductivity, electrical resistivity thermal expansion coefficient, and also the nonlinear mechanical effects. This makes it possible to put the simulation of electrothermal microactuator using the nodal analysis method into practice. This model has been verified by a FEM software, ANSYS. The accuracy of this model is rather high. And it has high computing efficiency.

关 键 词：热执行器 节点模型 傅立叶级数 等效电路 

分 类 号：TN402[电子电信—微电子学与固体电子学] TN405