基于模态分析的静电驱动圆薄板宏模型建立方法  

Macromodeling of Electrostatically Actuated Circular Plate Based on mode analysis

作　　者：林谢昭[1] 应济[1] 

机构地区：[1]浙江大学微系统研究与发展中心

出　　处：《传感技术学报》2006年第05A期1368-1371,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(50105020;50475104);福州大学科技发展基金项目(2004-XY-10)

摘　　要：为了研究静电致动圆板静态和动态特性,在模态分析法的基础上,利用多维非线性函数的Levenberg-Marquardt拟合方法,将板的动能、弹性能和电容写成以模态坐标表示的解析式.结合Hamilton原理,导出静电致动微圆板的动力学特性方程的宏模型.以此为基础研究了板的静态特性及其三角波、方波信号激励下的动态响应.结果表明,模态分析方法能够考虑到残余应力的影响,所建立的动态宏模型不仅大大地减少了计算费用,而且具有足够的仿真精度.For investigate the quasi-state and dynamic characterization of an electrically actuated circular plate, a method for generating a reduced order model （ROM or macro-model） is presented, which is based on mode analysis. The ROM is represented as an analytical function in the term of a set of mode coordinates. After a set of finite element analysis running is completed, a nonlinear function fitting scheme will be used for constructing an analytical model of kinetic energy, strain energy and electrostatic co-energy. Then the generalized equations of motion are used for the electrically actuated circular plate quasi-state and dynamic behaviors simulation. The calculated results show that this macromodeling method can consider the effect of residual stress, and the resulting ROM can capture the dynamic behaviors of the circulate plate very well.

关 键 词：微机电系统(MEMS) 宏模型 模态分析方法 静电驱动 

分 类 号：TH16[机械工程—机械制造及自动化]