基于硅微梳齿型谐振器的MEMS动态测试研究  

Research of MEMS Dynamic Testing Based on Comb Silicon Micro-Resonator

作　　者：郑丽娜[1] 薛晨阳[1] 张文栋[1] 熊继军[1] 张斌珍[1] 孔繁华[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,太原030051

出　　处：《传感技术学报》2006年第05A期1531-1534,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目资助(50535030);电子测试技术国家级重点实验室开放基金资助

摘　　要：在利用激光多普勒对硅微梳齿型谐振器多阶振动频率进行提取的基础上,结合频闪显微干涉测试技术对其谐振频率及其振幅进行了动态测试,并根据测试结果推导了谐振器的动态应力值.实验测试结果及应力推导结果与ANSYS的仿真结果相符合.Based on laser Doppler technique, multistage oscillation frequency of the comb silicon micro-re sonator are obtained, the resonance frequency and the amplitude are tested combining with stroboscope in terferometric technology, and the dynamic stress value of the resonator is deduced according to the test re suit. The test results and the deduced stress value are matched with the ANSYS simulation results.

关 键 词：谐振频率 振幅 应力 

分 类 号：TM93[电气工程—电力电子与电力传动]