非晶硅微测辐射热计热学和光学分析  

Thermal and Optical Analysis of Amorphous Silicon Micro-Bolometer

作　　者：李世彬[1] 吴志明[1] 蒋亚东[1] 李伟[1] 廖乃镘[1] 

机构地区：[1]电子科技大学光电信息学院电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《传感技术学报》2006年第05A期1721-1724,共4页Chinese Journal of Sensors and Actuators

摘　　要：通过理论计算得到了桥腿长度和宽度与热导和桥面温升之间的线性关系，辐射功率和桥面温升之间的线性关系，并利用ANSYS软件对线性关系进行模拟验证．根据光学导纳矩阵法，利用Mat Lab软件模拟微测辐射热计对红外线的吸收率，结果表明微测辐射热计对8～13μm波段红外有很好的吸收率．分析结果为微测辐射热计的研制提供了可靠依据．With theoretic calculating, it was proved the linear relation between the length, width of micro- bridge and conductivity, temperature rise of micro-bridge surface. There is the same relation between the radiation power and the temperature rise of micro-bridge surface. These linear relationships mentioned previously were testified using FEA （Finite Element Analysis） software ANSYS. According to optical admittance matrix method, the infrared absorptivity of micro-bolometer was simulated by MatLab software. The result indicates the micro-bolometer has high absorptivity to infrared in 8-13μm wave band. The analysis result of this paper offered reliable evidence to study micro-bolometer.

关 键 词：微测辐射热计 非晶硅 微桥 有限元 

分 类 号：TN215[电子电信—物理电子学]