分立活塞式MEMS微变形镜的系统级设计  

System-Level Design of Segmented Piston-like Micro Deformable Mirrors

作　　者：虞益挺[1] 苑伟政[1] 乔大勇[1] 李晓莹[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《传感技术学报》2006年第05A期1761-1763,1767,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(90407020);教育部新世纪优秀人才支持计划资助项目(NCET-05-0869)

摘　　要：利用实验室自主研发的集成设计平台,搭建了分立活塞式MEMS微变形镜的系统级行为模型,并对其有效性和准确性进行了验证;在此基础上完成了微变形镜的结构设计,并由仿真得到了结构的性能参数.研究结果表明,采用系统级方法进行MEMS器件的设计能够在确保求解精度的前提下,显著提高设计效率,缩短设计周期,减小设计成本;所设计的MEMS微变形镜的各项性能指标完全能满足一般自适应光学系统的应用要求.A system-level behavioral model of segmented piston-like micro deformable mirrors was accomplished by utilizing our own-developed integrated design platform for MEMS CAD. Its validity and veracity were verified using both the finite element method and theoretical method. The structural parametric design of micro deformable mirrors was finished and performances were obtained by system-level simulation. Results show that system-level method can be applied for the design of MEMS devices to greatly improve the efficiency, reduce the period and decrease the cost while maintaining a considerable computing accuracy. And the performances of the designed micro deformable mirrors can meet the requirements for common Adaptive Optics applications.

关 键 词：微变形镜 分立活塞式 系统级 集成设计平台 

分 类 号：TN491[电子电信—微电子学与固体电子学]