基于光流技术MEMS平面微运动特性的测量  

Measuring In-plane Motion of Micro-MEMS Based on Optical Flow

作　　者：张少婧[1] 胡晓东[1] 栗大超[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《纳米技术与精密工程》2006年第3期240-244,共5页Nanotechnology and Precision Engineering

基　　金："863"计划重大专项资助项目(2004AA404042);天津市重大科技项目(043185911).

摘　　要：实现MEMS动态测试技术中平面微运动特性的测量,关键是记录MEMS运动过程中的瞬间运动状态,并恢复MEMS面内的运动历程．为此,介绍了光流技术,并提出利用邻域优化法进行微结构运动的光流计算．组建了基于频闪成像的MEMS平面运动测试系统,通过该系统获得MEMS谐振器周期运动不同相位下的清晰图像序列．利用邻域优化计算该图像序列的光流,选取合适的邻域大小和阈值,得到了MEMS谐振器在特定驱动频率下的运动幅度-相位图及其拟合曲线,从而获得微谐振器在此驱动频率下的运动幅度值为2．12μm．实验结果表明,该方法是准确有效的．To realize in-plane micro-motion measurement for MEMS dynamic testing technique, the key is to record motion moment of MEMS and recover MEMS in-plane motion course. Optical flow is introduced and a local optimization algorithm is proposed to compute optical flow for microstructure motion. One measurment system for in-plane motion characteristics of MEMS is built on the basic of stroboscopic imaging technique. By this system, MEMS resonator is driven by applying one periodic sine wave voltage signal, and one bright-field image sequence is acquired at different motion phases. Optical flow of this image sequence is calculated by using local optimization algorithm and choosing appropriate size of a certain location and threshold. Finally, MEMS resonator＇s amplitude-phase chart and correspondent fitted curve under a certain frequency are acquired and motion amplitude of MEMS resonator is about 2.12 μm. It is proved that this method is exact and effective.

关 键 词：光流 邻域优化 频闪成像 MEMS谐振器 运动特性 

分 类 号：TH703[机械工程—仪器科学与技术]