Cu膜的光学特性尺寸效应及最小连续膜厚研究  

Size Effect of the Optical Properties and the Minimal Continuous Thickness of Copper Films

作　　者：范平[1,2] 邵建达[2] 易葵[2] 齐红基[2] 范正修[2] 

机构地区：[1]深圳大学理学院应用物理系,广东深圳518060 [2]中国科学院上海光学精密机械研究所光学薄膜技术研发中心,上海201800

出　　处：《光子学报》2006年第10期1542-1546,共5页Acta Photonica Sinica

基　　金：国家863计划(2004AA847060);深圳市科技计划(200319)资助

摘　　要：采用离子束溅射在K9玻璃基底上沉积了不同厚度的Cu膜,利用Lambda-900分光光度计,测量了波长为310nm到1300nm范围内Cu膜的反射率和透射率.选定波长为310、350、400、430、550、632、800、1200nm时对薄膜的反射率、透射率和吸收率随膜厚变化的关系进行研究.同时,对Cu膜的光学常量也进行了讨论.结果显示,Cu膜的光学特性都有明显的尺寸效应.将波长为550nm时的反射率和透射率随Cu膜厚度变化关系的交点对应厚度作为特征厚度,该厚度可认为是金属Cu膜生长从不连续膜进入连续膜的最小连续膜厚.根据这一特征判据,离子束溅射沉积Cu膜样品的最小连续膜厚为33nm.利用原子力显微镜观测了膜厚在特征厚度附近时Cu膜的表面形貌.Cu films of different thickness were deposited on K9 glass using ion beam sputtering. The reflectance and transmittance of Copper films in the wavelength range from 310 nm to 1300 nm have been measured by Lambda-900 spectrophotometer. Relationships between reflectance, transmittance, absorptance and thickness of Cu films in the wavelength selected 310, 350, 400, 430, 550, 632, 800, 1200 nm have been discussed. The optical constants of Cu films have also been discussed. The results show that the optical properties of Cu films have obvious size effect. There is a point of intersection, which is located in the relationship curves of between reflectance, transmittance and thickness of Cu films at wavelength 550 nm. The corresponding thickness of this point of intersection can be thought of as the minimal continuous thickness of the growth of metallic films from discontinuous to continuous. According to this characteristic criterion, the minimal continuous thickness of Cu films prepared by ion beam sputtering is 33 nm. The topography images of Cu films near the minimal continuous thickness were observed by using atomic force microscopy（AFM）.

关 键 词：薄膜物理学 光学特性 尺寸效应 CU膜 最小连续膜厚 

分 类 号：O484.4[理学—固体物理]