Ba_(1-x)Sr_xTiO_3薄膜的Sol-gel制备技术与微结构  

Microstructure and Fabrication of Barium Strontium Titanate(BST) Thin Films Basing a Novel Sol-gel Route

作　　者：李桂英[1] 余萍[1] 肖定全[1] 

机构地区：[1]四川大学材料科学与工程学院

出　　处：《人工晶体学报》2006年第5期931-935,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金重点项目(No.50132020)资助

摘　　要：研究了利用钡、锶的碳酸盐代替醋酸盐作原料,采用新的Sol-gel技术制备Ba1-xSrxTiO3(BST)铁电薄膜的技术。采用碳酸钡、碳酸锶和钛酸四丁酯作原料配制BST溶胶;通过TG/DTA分析确定了BST薄膜的制膜工艺;使用XRD、SEM、AFM技术分析了薄膜的微结构。研究结果表明,采用碳酸盐作为钡、锶的原料,用冰醋酸和乙二醇甲醚混合液作溶剂,可配制出澄清透明、能长时间放置的溶胶,用此溶胶制备出了膜厚均匀、表面光洁致密、没有裂纹的全钙钛矿相的BST薄膜;采用扫描探针显微镜的压电响应模式(PFM)观察到了BST薄膜中的具有纳米结构的a畴和c畴。BST thin films were prepared through a novel Sol-gel process using the carbonates as the substitute of acetates. The starting materials were barium carbonate, strontium carbonate and titanium-tetrabutoxide. The crystal structure, surface morphology, grain size and the domain contrast of BST thin films have been investigated by X-ray diffraction （XRD）, scanning electric microscopy （SEM）, atomic force microscopy （AFM）, and piezoelectric force microscopy, respectively. The results show that the fabrication of the Sol-gel derived BST thin films can be carried out well by using carbonates of Ba and Sr as the starting materials and using the mixture of acetic acid and 2-methoxyethanol as solvent. As well, the as-prepared BST thin films are compact, continuous and possess completely perovskite structure. Nano-sized a-domain and c-domain were observed by using piezoelectric force microscopy （PFM）.

关 键 词：BST薄膜 溶胶-凝胶技术 微结构 电畴 

分 类 号：O78[理学—晶体学]