提高硅微谐振系统性能的一项有效措施  

An Effective Method for Improving Silicon Micro-resonator System Performance

作　　者：夏敦柱[1] 王寿荣[1] 周百令[1] 

机构地区：[1]东南大学仪器科学与工程系,南京210096

出　　处：《中国工程科学》2006年第10期71-74,共4页Strategic Study of CAE

基　　金："八六三"国家高技术研究发展计划资助项目(2002AA812038);"十五"计划国防预研资助项目(41308050109)

摘　　要：介绍了硅微谐振器系统的工作原理,重点给出了一种基于新型的DDS器件AD9954的智能谐振系统设计与实现。详细分析了AD9954作为智能精密驱动源的粗细搜索两种阶段工作流程并给出与DSP器件的数字接口技术。结合实验数据和扫频曲线,得出在不同真空度环境下谐振器的两种扫频结果,并对谐振系统的工作情况给予评价。The working principle of silicon micro-resonator system was firstly introduced. An intelligence silicon micro-resonator system design and realization was presented in focus. Its two step working flows for roughness and fineness searching and digital interface technology were analyzed in detail. Combined with experimental data and sweeping curve, two different searching results came out under different vacuum circumstance and its working performance was well evaluated.

关 键 词：直接数字合成(DDS) 硅微谐振器 AD9954 数字信号处理(DSP) 

分 类 号：U666.1[交通运输工程—船舶及航道工程]