宽波段的类金刚石薄膜光学窗口  

Development of diamond like carbon film coated window with wide spectral transmission

作　　者：白婷[1] 刘晶儒[1] 叶景峰[1] 王晟[1] 叶锡生[1] 

机构地区：[1]西北核技术研究所,西安710024

出　　处：《强激光与粒子束》2006年第10期1629-1633,共5页High Power Laser and Particle Beams

基　　金：国家863计划项目资助课题

摘　　要：介绍了实用化宽波段光学镀膜窗口的研制过程,研制的光学窗口实现了从可见至远红外波段使用同一光学器件工作的目标,主要波段透过率在70%以上。该产品膜层均匀性优于95%,可以抵抗潮热、温度变化等恶劣环境,可耐受高功率的红外激光辐射,通过了GJB2485—95《光学膜层通用规范》和Q/AF20087—2003《宽波段军用光学镀膜窗口规范》的标准检测。The development of diamond like carbon（DLC） film coated optical windows with wide spectral transmission is presented in this paper. This DLC coated window can be used as an optical window in the spectral range of 0.53-12.00μm with the transmission of higher than 70% in most of the spectral band. The uniformity of the film is better than 97% with the area of Ф60 ram. The optical performance and environment adaptability of the DLC coated window are also tested. It can not only work well in damp, hot or cold environment but also tolerate infrared high power lasers. The windows have been tested by ＂general specification for optical coatings＂ （GJB2485--95） and ＂specification for the coated window with wide spectral transmission＂（Q/ AF20087-2003）.

关 键 词：宽波段光学窗口 类金刚石薄膜 脉冲激光淀积 均匀性 

分 类 号：TN249[电子电信—物理电子学]