RYJ-II型热压成形设备实现压力均匀性的调平装置  

A Precision Leveller for Achieving Pressure Uniformity on RYJ-II hot-embossing Machine

作　　者：王晓东[1] 吕长辉[1] 韦鹤[1] 罗怡[1] 刘冲[1] 

机构地区：[1]大连理工大学微纳米技术及系统辽宁省重点实验室,辽宁大连116024

出　　处：《机电产品开发与创新》2006年第5期59-61,共3页Development & Innovation of Machinery & Electrical Products

基　　金：国家863高技术研究发展计划资助项目(2004AA404260)

摘　　要：针对热压成形设备中由于上下两热压面之间的不平行而引起的压力不均匀,设计了一种精密调平装置。对精密调平装置的设计原理、结构、调平方法和调平过程做了详细的讨论,最后通过实验验证精密调平装置能够准确的调节下热压面的姿态,使两个热压面的平行度达到10μm,实现热压过程中的压力均匀。A precision leveller was designed for adjusting pressure ununifonnity, which was caused by Non-parallelism of the two embossing surfaces of the hot-embossing machine. The design theory, the structure and the adjust method of the precision leveller were presented in detail. In experiment, the both surfaces were adjusted accurately to be parallel by the precision leveller with parallelism error less than 10μm, and achieved pressure uniformity during the embossing process.

关 键 词：精密调平装置 压力均匀性 热压成形设备 

分 类 号：TH112.7[机械工程—机械设计及理论]