一种新型双稳态微机电系统电磁微继电器的研制  

Development of a Novel Bi-stable MEMS Electromagnetic Microrelay

作　　者：付世[1] 丁桂甫[1] 王艳[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《上海交通大学学报》2006年第11期1947-1950,1954,共5页Journal of Shanghai Jiaotong University

基　　金：上海市科技发展基金(05DZ22309);国家自然科学基金(10377009)资助项目

摘　　要：介绍了一种基于微机电系统(MEMS)技术的新型双稳态电磁微继电器的设计及其制作工艺,并对其主要性能进行了测试.利用换向脉冲电流驱动高效的“三明治”式电磁驱动结构,带动电接触刷的运动来控制外电路的通断;辅助设计的永磁稳定结构使器件在脉冲间歇能够保持稳定状态而无需额外功耗.测试结果表明,这种新型电磁微继电器具有体积小,功耗低,响应速度快,接触电阻小等优点.The design, fabrication and main performance of a novel bi-stable MEMS electromagnetic microrelay were introduced. Bi directional pulse currents actuate the highly efficient ＂sandwich＂ driver mecha nism and make the electronic brush move to control the on/off state of the outer circuit. Microrelay can keep stable states without other power contributed to the aided design, permanent magnetic structure, at the interval between the adjacent pulses. The measurement results indicate that the novel microrelay fabricated by MEMS technology has the following merits such as small volume, high response speed, low power consumption and resistance and so on.

关 键 词：微机电系统 电磁微继电器 双稳态 

分 类 号：TM581.3[电气工程—电器]