基于MEMS技术的微型分光光度计  

Micro-spectrophotometer based on MEMS technology

作　　者：周连群[1] 吴一辉[1] 张平[1] 宣明[1] 李正刚[1] 贾宏光[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处：《光学精密工程》2006年第6期990-997,共8页Optics and Precision Engineering

基　　金：国家863MEMS重大专题资助项目(No.2004AA404250);中国科学院二期创新资助项目

摘　　要：研制出了一种采用微硅片对准技术和微硅片狭缝的新型微型分光光度计。采用MEMS工艺制造出了体积小、精度高的微硅片对准机构和微硅片狭缝,并且对其性能进行了分析和论证。同时对影响分光光度计线性度精度的样品池的光学特性进行了分析,推导出了透射光强与样品池的折射率、被探测介质的折射率关系式,并进一步分析因折射率引起光强的变化对吸光度的影响。实验结果表明,该微型分光光度计可以分辨出介质折射率相差0.01介质,同时参比介质的不同仅仅对A-C曲线产生平移,而对相关系数和斜率无任何影响,通过对实验数据的计算得到以空气和蒸馏水两种折射率的介质为参比时的系统相关系数都大于0.999,说明所研制的基于MEMS技术的微型分光光度计具有高度显著线性相关性。A new mini-spectrophotometer was developed by adopting micro-silicon-slit and micro-sili- confixer, which are based on MEMS technology. Both the micro-silicon-slit and the micro-silicon-fixer have such feature as small volume, high precision, which are laid out and analyzed later. Meantime, by analysis of the sample cell＇s optical characteristics which have some impact on the linearity of the spectrophotometer, a relation equation is put forward which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency. When the water and the air are taken as referenced medium, the experiments demonstrate that the effect of different refractive of references doesn＇t influence the correlation coefficient r and the slope of the Absorbency-Concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon- fixer is worked out, its correlation coefficient r〉 0. 999 and it＇s refractive index resolving power is better than 0.01.

关 键 词：微硅片对准 微硅片狭缝 微型分光光度计 微小型光纤光谱仪 微光机电系统 

分 类 号：TH744.1[机械工程—光学工程] O433.1[机械工程—仪器科学与技术]