制备工艺对BaO-TiO_2-B_2O_3-SiO_2体系LTCC性能和微观结构的影响  

The Influences of fabrication processing to properties and microstructure of BaO-TiO_2-B_2O_3-SiO_2 glass-ceramics for LTCC

作　　者：崔学民[1] 叶少峰[1] 邱树恒[1] 童张法[1] 周济[2] 

机构地区：[1]广西大学化学化工学院,广西南宁530004 [2]清华大学新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《功能材料》2006年第12期2019-2022,共4页Journal of Functional Materials

基　　金：国家高技术研究发展计划(863计划)资助项目(2003AA32G030);国家重点基础研究发展计划(973计划)资助项目(2002CB613306)

摘　　要：研究了溶胶-凝胶法、高温熔融法、预煅烧法分别制备的BaO-TiO2-B2O3-SiO2体系LTCC的介电性能、烧结性能以及微观结构。研究发现,溶胶-凝胶法制备的LTCC材料烧结温度较低,坯体在880℃烧结即可达到最大收缩,其烧结收缩率大于高温固相法制备的LTCC;高温熔融法制备的LTCC介电性能稳定,但烧结温度偏高,大约950℃才能达到最大收缩;预煅烧法制备粉体简单、有效,烧结温度在900℃左右,但LTCC中活性成分较多,容易造成气孔率偏高,致密化难度增大且介电常数稳定性不好等缺点;在总结这3种制备工艺对LTCC玻璃陶瓷材料性能和微观结构的基础上,利用适量掺杂Al2O3等添加剂的方法,在保证介电性能满足应用的前提下,大大提高了预煅烧法制备LTCC的烧结体致密度。This paper studied the dielectric performances, fired properties and microstructure of BaO-TiO2-B2O3-SiO2 glass-ceramics for LTCC, which was fabricated by sol-gel method,pre-calcined method and molten method, respectively. The experimental results showed the densification and shrinkage of sol-gel LTCC powders were the largest,and it＇s sintering temperature was the lowest among three kinds of powders;but this processing was low efficient and high cost. The dielectric properties of molten LTCC were stability; but it＇s sintering temperature was higher and the cost was also higher. The pre-calcined processing was simple and effective method but it could bring porous microstructure to LTCC, and it would result in instability of dielectric constant; hence,improved the microstructure of pre-calcined LTCC may get effective application. The research results showed the appropriate alumina additive of 2wt%-Swt% that could remove the pore and improve the densification in sintered body of LTCC.

关 键 词：LTCC 介电性能 气孔率 AL2O3 

分 类 号：TQ174[化学工程—陶瓷工业]