提高准分子激光打孔质量的方法研究  

Study on a method of improving the quality of excimer laser drilling

作　　者：郭商勇[1] 陈涛[1] 刘世炳[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022

出　　处：《激光技术》2006年第6期625-627,共3页Laser Technology

基　　金：国家自然科学基金重点资助项目(50335050;北京市自然基金重点资助项目(3031001);北京市教育委员会科技发展计划基金资助项目(Km200310005016)

摘　　要：为了提高准分子激光打孔质量,分析了影响现行加工系统打孔质量的因素,在此基础上提出利用钻孔法改进打孔效果的解决方案。根据此方案设计了加工光路,进行了微孔加工实验。实验结果表明,采用248nm准分子激光加工有机材料聚甲基丙烯酸甲酯,微孔形状规则,孔径锥度可减小至0.055。该加工系统和方法提高了微孔加工的速度和质量,在微加工领域具有很好的实际应用价值。To improve the quality of excimer laser drilling, the factors affecting the drilling quality with excimer laser system are analyzed. Based on the analysis, a new method for micro-drilling is put forward and an optical system is designed. The experimental result shows that when the excimer laser with wavelength of 248nm drill on the polymethyl methacrylate with this system,the figure of the micro-hole is regular and the quality of the holes is improved. The system improves the speed and the quality of micro-drilling and is feasible in industrial areas.

关 键 词：激光技术 激光钻孔 准分子激光 掩模 打孔质量 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]