谐振式硅微结构压力传感器非线性振动特性研究  

Investigation on nonlinear vibration characteristics of resonant silicon microstructure pressure sensor

作　　者：樊尚春[1] 乔少杰[1] 张轩[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《仪器仪表学报》2006年第12期1670-1673,共4页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(50275009);航空科学基金(02I51018)资助项目

摘　　要：本文研究了谐振式硅微结构压力传感器在单频激励和双频激励情况下的非线性振动特性。利用多尺度法研究运动方程中三次非线性项对传感器频率特性的影响规律,提出了改善谐振式硅微结构传感器特性的方法以及在实现闭环自激系统时应采取的措施。The nonlinear vibration characteristics of resonant silicon microstructure pressure sensor are investigated under single and two frequency excitation signal conditions. The influence of 3rd order nonlinear term on frequency characteristics of the sensor is analyzed using multi-scale method. Measures to improve the performance of the sensor are presented. Some issues to be considered in realizing self-exciting closed loop of the sensor are also given.

关 键 词：非线性振动 多尺度法 压力传感器 硅 微结构 

分 类 号：TH814.6[机械工程—仪器科学与技术]