激光诱导醋酸铜乙醇溶液反应直写金属铜线  

Direct Writing Copper Line from Copric Acetate in Alcohol Solution Reaction Induced by CO_2 Laser

作　　者：谢湘华[1] 张谊华[1] 方尔梯[1] 膝玉美 曾宪康[1] 杨永刚[1] 黄宣劭 

机构地区：[1]华东理工大学化学物理研究室,上海市激光技术研究所

出　　处：《应用激光》1996年第6期252-254,260,共4页Applied Laser

摘　　要：用ＣＯ２激光辐照诱导醋酸铜乙醇溶液反应，在石英衬底上激光直写得到金属铜线，研究了不同的写线速度对激光直写的效果，得到一个最佳的写线速度，该写线速度随激光强度的增大而提高。Copper lines are directly written on a quartz substract from copric acetate in alcohol solution reaction induced by a CO2 laser. The effect of the laser direct writing speed on thequality of copper line is studied. The result shows that when the other conditions are in suitablevalues there is a optimum writing speed. The value increases with the laser power.

关 键 词：醋酸铜溶液 激光直写 金属铜线 二氧化碳激光 

分 类 号：TN24[电子电信—物理电子学]