双功能弯曲光纤探针的制作  

Fabrication of two-function bent optical fiber probe

作　　者：张仁群[1] 潘石[1] 李鹏飞[1] 

机构地区：[1]大连理工大学物理系近场光学与纳米技术研究所,辽宁大连116023

出　　处：《电子显微学报》2006年第6期494-497,共4页Journal of Chinese Electron Microscopy Society

摘　　要：探针是所有扫描探针显微镜的关键部件。本文提出了一种采用普通单模光纤制作在原子力和光子扫描隧道组合显微镜（AF／PSTM）上使用的弯曲光纤探针的方法。通过合理的选择实验参数，经过热拉仲与化学腐蚀两个过程，得到弯曲部分的角度为110°～120°锥角约60°～80°的弯曲光纤探针。经扫描电镜观察，光纤探针的尖端直径小于100mm。此种方法加工光纤探针的成品率约70％左右。Probe is a crucial part of all the scanning probe microscopes. We derived a simple method to fabricate the bent optical fiber probe optical fibers using mechanically drawn and chemical etching for an atomic force/Photon scanning tunneling microscope （AF / PSTM）. By improving the operation and choosing parameters, we obtained the cone angle varying from 60° to 80° and the bent angle varying from 110° to 120°.The scanning electron microscope （SEM） mierugraph showed that the apex diameter of the fiber probe obtained by this method was less than 100 nm. The reproducibility was close to 70% .

关 键 词：光纤探针 热拉伸 化学腐蚀 原子力显微镜 光子扫描隧道显微镜 

分 类 号：TN253[电子电信—物理电子学] TG115.215.7[金属学及工艺—物理冶金]