薄膜体声波谐振器的研究进展  

Research Progress in Film Bulk Acoustic Resonator

作　　者：谢和平[1] 张树人[1] 杨成韬[1] 张洪伟[1] 叶井红[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《材料导报》2006年第F11期330-332,共3页Materials Reports

基　　金：国家重大基础研究项目资助(51310Z)

摘　　要：薄膜体声波滤波器作为一种发展高频滤波器的全新解决方案,比声表面波滤波器(SAWF)、陶瓷介质滤波器具有更高的Q值,低的损耗和在高频时具备更高的功率承受能力。介绍了薄膜体声波谐振器的研究历史和研究概况,薄膜体声波谐振器的原理和3种典型结构,具体阐述了薄膜体声波谐振器的关键技术及其材料体系的要求。As a new method for development of high frequency filter, the bulkacoustic wave filter composed of piezoelectric thin film resonators has many features superior to those of other small filters such as a surface acoustic wave （SAW） filter and a ceramic filter, such as a high Q factor that leads to low-loss and a high power durability partic ularly in the highfrequency. In this paper, the feature and history of the piezoelectric thin film resonator filtersare are described, and the developments of piezoelectric thin film resonator filters in the world are reviewed. The principle and typical structure of the FEAR are analyzed, and the key technology and requirements of the materials are represented in detail.

关 键 词：微电子机械系统 薄膜体声波谐振器 SMR结构 悬空结构 

分 类 号：TN65[电子电信—电路与系统]