薄膜厚度和光学常数的主要测试方法  

Test methods for film thickness and optical constants

作　　者：陈燕平[1] 余飞鸿[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光学仪器》2006年第6期84-88,共5页Optical Instruments

摘　　要：准确地测量和控制薄膜厚度和光学常数等参数,在薄膜制备和分析和应用都是极为重要的。对薄膜的厚度和光学常数测试方法作了归纳和分类,并对几种主要的测试方法作了简要的介绍,分析了各自的特点及存在的问题。在测量薄膜的厚度和光学常数时,必须根据待测样品和测量精度要求选择合适的方法。It is very important to measure thickness and fabrication, research and application. Most test methods have optical constants accurately for film been concluded and assorted, some primary methods are presented briefly,and their characteristics and problems are analysed respectively. Correct method should be used based on samples and measurement precision requirement.

关 键 词：薄膜厚度 光学常数 探针测量 光谱测量 椭偏测量 

分 类 号：O484.32[理学—固体物理]