玻璃材料微通道的三倍频激光微加工研究  

The microfabrication of microchannel on glass with frequency tripled Nd:YAG laser

作　　者：翟立斌[1] 赵宏亮[1] 陈继民[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022

出　　处：《应用激光》2006年第6期365-368,共4页Applied Laser

基　　金：国家自然科学基金项目(05575005);北京市教委项目(KW200510025013)资助

摘　　要：本文提出了一种新的制备生物芯片微通道的方法,从玻璃材料的特点与激光精密加工的优点出发,用三倍频ND：YAG激光器(λ=355nm)在玻璃基体上加工生物芯片微通道。文章对这种方法进行了初步探索,先用三倍频紫外激光对玻璃直接刻蚀,再用显微镜、三维形貌仪观察与测量所形成的微通道的质量。实验得出了激光脉冲重复频率与振镜扫描速度对微通道刻蚀的影响关系,以及要防止玻璃碎裂,所需要的激光能量密度。Based on the virtue of the glass material and the advantage of the laser microfabrication, a novel method of fabricating the microchannel of Biochip was put forward in this paper. Here introduced some investigation. Fist ablate the microchannel directly on the glass substrate using a ultraviolet frequency tripled ND：YAG laser, and then measure the quality of the microchannel using the microscope and the phase shift interferometry 3 D surface measurement. The results show that the quality of the laser microfabrication depend on several factors, including focus length, the pulse repetition rate and beam feed rate, and the results indicate the relationship that the ablation of the microchannel relative to the pulse repetition rate and beam feed rate. Furthermore the needed laser fluence to avoid the crack of the glass substrate was gained.

关 键 词：玻璃 生物芯片 微通道 三倍频激光 微加工 

分 类 号：TN241[电子电信—物理电子学]