硅PIN光电二极管光谱响应特性的数值模拟计算  

Numerical Simulation Calculation on Spectral Response of Silicon PIN Photodiode

作　　者：张卓勋[1] 但伟[1] 王波[1] 向勇军[1] 赵珊[1] 鲁卿[1] 

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2006年第6期690-693,共4页Semiconductor Optoelectronics

摘　　要：对硅PIN光电二极管的光谱响应特性作了详细的分析计算,得到了硅PIN光电二极管光谱响应的计算公式;给出了器件光谱响应曲线的绘制方法。实测数据与公式计算结果吻合较好。讨论了器件工艺参数变化对光谱响应的影响。The spectral response characteristics of silicon PIN photodiode have been studied by numerical calculation. The formula of spectral response for silicon PIN photodiode has been proposed as well as the explanation of its drawing method. Simulation result is fairly consistent with the experimental one. The influences of process parameters on its spectral response characteristics have been discussed.

关 键 词：数值计算 光谱响应 硅光电二极管 

分 类 号：TN364.2[电子电信—物理电子学]