硅微Z轴谐振陀螺仪闭环伺服控制系统设计  

Design of Silicon Micromechanical Z-Axis Gyroscope Closed-Loop Servocontrol System

作　　者：夏敦柱[1] 周百令[1] 

机构地区：[1]东南大学仪器科学与工程系,江苏南京210096

出　　处：《测控技术》2007年第1期1-3,6,共4页Measurement & Control Technology

基　　金：国家863项目(2002AA812038);十五计划国防预研资助项目(41308050109)

摘　　要：根据自行设计的硅微Z轴谐振陀螺仪的工作原理,提出了闭环伺服控制系统模型,在对开环检测模型分析的基础上设计了闭环伺服控制系统,并用Matlab软件对闭环伺服系统的频域和时域特性进行了仿真分析,选取了合适的校正环节及优化参数,使系统有较高的稳定裕度和较好的动态特性。通过实验调试实现了初始检测电容差引起的信号以及正交信号的反馈抑制控制,达到了较高的控制精度。According to self-design silicon micromechanical Z-axis gyroscope, the closed-loop servocontrol system construction is presented. Based on open-loop detection analysis, a closed-loop servo control structure is designed. By simulating and analyzing the servo control system frequency and time domain characteristics, appropriate regulation modules and optimal parameters are selected to make the system have a high stable margin and excellent dynamic performance. The original capacitance difference and cross-coupling signal are well restrained to reach a reliable control accuracy through the experimental test.

关 键 词：硅微Z轴陀螺仪 闭环伺服控制 校正环节 

分 类 号：U666.1[交通运输工程—船舶及航道工程]