Ellipsometric analysis and optical absorption characterization of nano-crystalline diamond film  

作　　者：王林军 蒋丽雯 任玲 刘健敏 苏青峰 徐闰 彭鸿雁 史伟民 夏义本 

机构地区：[1]School of Materials Science and Engineering,Shanghai University,Shanghai 200072,China [2]Physics Department,Mudanjiang Normal College,Mudanjiang 157012,China

出　　处：《中国有色金属学会会刊：英文版》2006年第B01期289-292,共4页Transactions of Nonferrous Metals Society of China

基　　金：Project(60577040) supported by the National Natural Science Foundation of China; Project(0404) supported by Shanghai Foundation of Applied Materials Research and Development; Projects(0452nm051, 05nm05046) supported by the Nano-technology Project of Shanghai; Project(T0101) supported by Shanghai Leading Academic Disciplines

摘　　要：A nano-crystalline diamond (NCD) film with a smooth surface was successfully deposited on silicon by a hot filament chemical vapor deposition (HFCVD) method. Scanning electron microscopy (SEM), atomic force microscopy (AFM), RAMAN scattering spectra, as well as spectroscopic ellipsometry were employed to characterize the as-grown film. By fitting the spectroscopic ellipsometric data in the energy range of 0.75?1.50 eV with a three-layer model, Si|diamond+non-diamond|diamond+ non-diamond+void|air, the optical constants are obtained. The refractive index of the NCD film varies little from 2.361 to 2.366 and the extinction coefficient is of the order of 10?2. According to the optical transmittance and absorption coefficient in the wavelength range from 200 to 1 100 nm, the optical gap of the film is estimated to be 4.3 eV by a direct optical transition mechanics.A nano-crystalline diamond （NCD） film with a smooth surface was successfully deposited on silicon by a hot filament chemical vapor deposition （HFCVD） method. Scanning electron microscopy （SEM）, atomic force microscopy （AFM）, RAMAN scattering spectra, as well as spectroscopic ellipsometry were employed to characterize the as-grown film. By fitting the spectroscopic ellipsometric data in the energy range of 0.75-1.50 eV with a three-layer model, Sildiamond＋non-diamondldiamond＋ non-diamond＋voidlair, the optical constants are obtained. The refractive index of the NCD film varies little from 2.361 to 2.366 and the extinction coefficient is of the order of 10^-2. According to the optical transmittance and absorption coefficient in the wavelength range from 200 to 1 100 nm, the optical gap of the film is estimated to be 4.3 eV by a direct optical transition mechanics.

关 键 词：纳米晶金刚石膜 椭圆偏光分析 光学吸收特性 化学汽相淀积 

分 类 号：TB383.1[一般工业技术—材料科学与工程]