Influence of nitrogen gas on structure and properties of DLC films prepared by XeCl pulsed laser deposition  

作　　者：陈玉强 彭鸿雁 赵立新 李敏君 夏义本 王林军 徐闰 刘建敏 

机构地区：[1]Department of Physics,Mudanjiang Normal College,Mudanjiang 157012,China [2]Department of Physics,Mudanjiang Normal College,Mudanjiang 157012,China,Department of Electronic Materials,Shanghai University,Shanghai 200072,China [3]Department of Machinery and Electricity,Mudanjiang University,Mudanjiang 157011,China [4]Department of Electronic Materials,Shanghai University,Shanghai 200072,China

出　　处：《中国有色金属学会会刊：英文版》2006年第B01期306-309,共4页Transactions of Nonferrous Metals Society of China

摘　　要：Diamond-like carbon (DLC) films were prepared by PLD process using 308 nm(XeCl) laser beam with high power (500 W) and high frequency(300 Hz). The effects of nitrogen pressure on the structure and properties of the DLC films under such extremely high power and repetition rate were studied. The results indicate that the microstructures of the films are varied from amorphous carbon to graphitized carbon in long-order with the increase of N2 pressure, and the optical properties of the films are deteriorated as compared to that of DLC films without nitrogen.Diamond-like carbon （DLC） films were prepared by PLD process using 308 nm（XeCl） laser beam with high power （500 W） and high fi＇equency（300 Hz）. The effects of nitrogen pressure on the structure and properties of the DLC films under such extremely high power and repetition rate were studied. The results indicate that the microstructures of the films are varied fi＇om amorphous carbon to graphitized carbon in long-order with the increase of N2 pressure, and the optical properties of the films are deteriorated as compared to that of DLC films without nitrogen.

关 键 词：金刚石样碳膜 制备 PLD法 结构 性质 脉冲激光沉积 氮气压力 

分 类 号：TB383.2[一般工业技术—材料科学与工程]