高速微转子枢轴磨损特性分析  

WEAR CHARACTERISTICS ANALYSIS OF THE PIVOT IN HIGH-SPEED MICRO-ROTOR SYSTEMS

作　　者：张文明[1] 孟光[1] 周健斌[1] 

机构地区：[1]上海交通大学振动,冲击,噪声国家重点实验室,上海200030

出　　处：《机械强度》2007年第1期12-15,共4页Journal of Mechanical Strength

基　　金：国家杰出青年基金项目资助(10325209)~~

摘　　要：微转子枢轴是MEMS(micro-electro-mechanicalsystem)旋转机械中的主要驱动部件之一,在系统高速运转过程中会受到严重的摩擦磨损影响。文中采用统计学方法和分形方法分别分析微尺度效应对MEMS磨损的影响,建立半球形枢轴的数学模型,并分析其磨损率与摩擦力矩,探讨枢轴结构参数与操作参数对系统磨损特性的影响。仿真结果表明,尺度减小,磨损系数变小,增大载荷或增加微枢轴旋转次数均会加剧磨损程度。Micro-rotor pivot is a main component of rotation micro-machinery in power MEMS（micm-eleclro-mechanical system） and can be worn at the operation of the system. Statistics method and fractal method have been applied to analysis the effect of microscaling on the wear. A hemispherical pivot model is presented, the dimensional and volumetric wear rates and friction torque are investi- gated, and the effects of geometry parameters and operation parameters on the wear characteristics are discussed in detail. It is indicated that the wear coefficient decreases with the decrease of the scaling and the wear becomes serious with the increase of the apphod loading or the rotation numbers.

关 键 词：微机电系统 微转子 枢轴 磨损 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置] TH113.1[自动化与计算机技术—控制科学与工程]